Technical parameters:
1、Confocal system：Spot size 10um、Resolution 10nm
2、Detection range：Thickness 200~1500um、Warp 0~200μm、Bow -200μm~200μm、TTV 0~200μm、LTV 0~200 μm
3、OCR code reading function：accuracy>99%
4、scanning speed（6-inch）:<3.5 minutes/piece (map scanning with 2mm spacing for acquisition)
5、Repeatability: Thickness±0.1μm，Warp±0.5μm，Bow±0.3μm，TTV±0.5μm，LTV±0.2μm
6、Movement stroke of platform：X=205mm，Y=205mm，Z=50mm
Please contact Manager Wu from the sales department for more details (phone number:18565968707)